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Volumn 32, Issue 9, 1993, Pages L1273-L1276
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Modification of silicon dioxide by hydrogen and deuterium plasmas at room temperature
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL MODIFICATION;
DEUTERIUM;
DIFFUSION IN SOLIDS;
HYDROGEN;
INTERFACES (MATERIALS);
MASS SPECTROMETRY;
PHOTOELECTRON SPECTROSCOPY;
PLASMA APPLICATIONS;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SURFACES;
X RAY SPECTROSCOPY;
DEUTERIUM PLASMA;
HYDROGEN PLASMA;
SECONDARY ION MASS SPECTROMETRY;
X RAY PHOTOELECTRON SPECTROSCOPY;
SILICA;
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EID: 0027659056
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.32.L1273 Document Type: Article |
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Times cited : (5)
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References (7)
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