Measurement and thermodynamic analyses of the dielectric constant of epitaxially grown srtio3films

Japanese Journal of Applied Physics

Volumn 32, Issue 8 B, 1993, Pages L1157-L1159

  Abe, Kazuhide ^a   Komatsu, Shuichi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Bias field dependence; Dielectric constant; Epitaxial growth; SrTiO3thin film; Thermodynamic theory; Thickness dependence

Indexed keywords

CAPACITORS; DIELECTRIC PROPERTIES; ELECTRIC VARIABLES MEASUREMENT; EPITAXIAL GROWTH; STRONTIUM COMPOUNDS; THERMODYNAMICS; THIN FILM DEVICES;

BIAS FIELD DEPENDENCE; DIELECTRIC CONSTANT; STRONTIUM TITANATE; THICKNESS DEPENDENCE; THIN FILM CAPACITORS;

DIELECTRIC MATERIALS;

EID: 0027648612     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.32.L1157     Document Type: Article

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