SCOPUS 정보 검색 플랫폼

Surface Science

Volumn 293, Issue 3, 1993, Pages 195-201

Damage depth profiles determination by ellipsometry: a new numerical algorithm

(2) Tonova, D a Konova, A a

a UNIVERSITY OF SOFIA (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; ELLIPSOMETRY; ITERATIVE METHODS; MATHEMATICAL MODELS; NONLINEAR EQUATIONS; SURFACES;

DAMAGE DEPTH PROFILE; INHOMOGENEOUS SURFACE LAYER; INVERSE SCATTERING THEORY; NEWTON KANTOROVITCH METHOD; SPECTROSCOPIC ELLIPSOMETRY DATA; VARIABLE ANGLE OF INCIDENCE;

DEFECTS;

EID: 0027642001 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/0039-6028(93)90313-9 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.