A novel use of superconducting oxides in a non-contact carrier for VLSI plants

Applied Superconductivity

Volumn 1, Issue 7-9, 1993, Pages 1185-1192

  Ogiwara, Hiroyasu ^a   Azukizawa, Teruo ^a   Morishita, Mimpei ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DUST CONTROL; ELECTRIC CONDUCTIVITY; YTTRIUM COMPOUNDS;

FLUX PINNING; MAGNETICALLY SUPPORTED NON CONTACT WAFER CARRIER; TYPE TWO SUPERCONDUCTORS; VLSI PLANT;

SUPERCONDUCTING MATERIALS;

EID: 0027634347     PISSN: 09641807     EISSN: None     Source Type: Journal    
DOI: 10.1016/0964-1807(93)90426-3     Document Type: Article

References (4)

1. Quench and Melt Growth (QMG) Process for Large Bulk Superconductor Fabrication
2. A Linear Induction Motor Control System for Magnetically Levitated Carries System
3. A New Maglev System for Magnetically Levitated Carrier System