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Volumn 26, Issue 15, 1993, Pages 3862-3869

A Percolation View of Novolak Dissolution. 2. The Statistics of a Three-Dimensional Cubic Percolation Field and a Generalized Scaling Law

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; MATHEMATICAL MODELS; PHENOLIC RESINS; PHOTORESISTS; SOLUTIONS; THERMAL EFFECTS;

EID: 0027627416     PISSN: 00249297     EISSN: 15205835     Source Type: Journal    
DOI: 10.1021/ma00067a023     Document Type: Article
Times cited : (31)

References (16)
  • 2
    • 85022781964 scopus 로고
    • SPIE Tutorial Texts Series; SPIE: Bellingham, WA
    • Dammel, R. R. Diazonaphthoquinone-Based Resists; SPIE Tutorial Texts Series; SPIE: Bellingham, WA, 1992; Vol. 11, p 1.
    • (1992) Diazonaphthoquinone-Based Resists , vol.11 , pp. 1
    • Dammel, R.R.1
  • 3
    • 0008311678 scopus 로고
    • Suess, O. Annalen 1944, 556, 65.
    • (1944) Annalen , vol.556 , pp. 65
    • Suess, O.1
  • 7
    • 0343977782 scopus 로고
    • Percolation Theory
    • Essam, J. W. Percolation Theory. Rep. Prog. Phys. 1980, 43, 833.
    • (1980) Rep. Prog. Phys. , vol.43 , pp. 833
    • Essam, J.W.1
  • 14
    • 85022788229 scopus 로고
    • See also:, Europ. Patent A 0315 073, Oct 28
    • See also: Matsushita Electronics Industry. Europ. Patent A 0315 073, Oct 28, 1988.
    • (1988)
  • 15
    • 85022773125 scopus 로고
    • Europ. Patent 0234 327, Jan 29
    • Allied Signal Corp. Europ. Patent 0234 327, Jan 29, 1987.
    • (1987)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.