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Volumn 230, Issue 1, 1993, Pages 15-27

Spectroscopic ellipsometry studies on ion beam sputter deposited Pb(Zr, Ti)O3 films on sapphire and Pt-coated silicon substrates

(6) Trolier McKinstry, S a Hu, H a Krupanidhi, S B a Chindaudom, P a Vedam, K a Newnham, R E a

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; ELECTRIC PROPERTIES; ELLIPSOMETRY; FILM GROWTH; ION BEAMS; MODELS; PEROVSKITE; POLARIZATION; SEMICONDUCTING LEAD COMPOUNDS; STRUCTURE (COMPOSITION);

COERCIVE FIELD; FERROELECTRIC FILMS; LEAD ZIRCONATE TITANATE FILM; MULTI-CATION OXIDE FILM; MULTI-ION BEAM REACTIVE SPUTTERING; OPTICAL QUALITY PEROVSKITE FILM; POST-DEPOSITION ANNEALING; SPECTROSCOPIC ELLIPSOMETRY;

DIELECTRIC FILMS;

EID: 0027625142 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/0040-6090(93)90341-L Document Type: Article

Times cited : (47)

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