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Volumn 16, Issue 4, 1993, Pages 437-441
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Formation of SiO2 on Contact Surface and Its Effect on Contact Reliability
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Author keywords
[No Author keywords available]
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Indexed keywords
DEGRADATION;
DEPOSITION;
ELLIPSOMETRY;
FAILURE (MECHANICAL);
FILM GROWTH;
MOLECULAR WEIGHT;
PYROLYSIS;
SILICA;
SILICONES;
SPECTROMETRY;
SURFACES;
THERMAL EFFECTS;
ELECTRICAL CONTACT FAILURE;
SILICONE CONTAMINATION;
SILICONE VAPOR;
STATIC CONTACT RESISTANCE;
X RAY DIFFRACTOMETRY (XRD);
X RAY PHOTOELECTRON SPECTROMETRY (XPS);
ELECTRIC CONTACTS;
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EID: 0027617354
PISSN: 01486411
EISSN: None
Source Type: Journal
DOI: 10.1109/33.237940 Document Type: Article |
Times cited : (21)
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References (9)
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