Fabrication of piezoelectric thick-film low-voltage multilayer actuators using a new double-paste printing technique

Sensors and Actuators: A. Physical

Volumn 37-38, Issue C, 1993, Pages 106-111

  Moilanen, H ^a   Leppavuori S ^a   Uusimaki A ^a  

^a UNIVERSITY OF OULU   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE NETWORKS; ADHESIVES; CERAMIC MATERIALS; ELECTRIC PROPERTIES; ELECTRODES; INTEGRATED CIRCUIT LAYOUT; INTERFEROMETRY; PIEZOELECTRIC DEVICES; POSITION MEASUREMENT; SCREEN PRINTING; SUPERLATTICES; THICK FILMS;

ACTIVE PIEZOCERAMIC LAYERS; DOUBLE PASTE SCREEN PRINTING TECHNIQUE; ELECTRODE LAYER PRINTING; INTERFEROMETRIC OUT OF CONTACT DISPLACEMENT MEASUREMENT; MULTILAYER CAPACITORS; PIEZOELECTRIC CONSTANTS; PIEZOELECTRIC THICK FILM LOW VOLTAGE MULTILAYER ACTUATORS; THICK FILM FABRICATION PROCESS;

ACTUATORS;

EID: 0027614781     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)80020-H     Document Type: Article

References (6)

1. Deformable mirror using the PMN electrostrictor
2. Micropositioning breaks new ground
3. Recent topics of ceramic actuators how to develop new ceramic actuator
4. A piezoelectric bimorph actuator for swinging operation in high resolution CCD module
5. Fabrication of an adjustable Fabry-Perot interference filter using piezoelectric thick film low voltage multilayer actuators
6. Determination of low voltage actuator displacements in dc and ac electric fields using optical interferometer