Texture and microstructure of thin copper films

Journal of Electronic Materials

Volumn 22, Issue 6, 1993, Pages 611-616

  Tracy, D P ^a   Knorr, D B ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Copper; microstructure; texture; thin film; x ray diffraction

Indexed keywords

COPPER; CRYSTAL MICROSTRUCTURE; INTEGRATED CIRCUIT MANUFACTURE; TEXTURES; THIN FILMS;

COPPER FILMS; INTERCONNECTS; THIN COPPER FILMS;

SEMICONDUCTING FILMS;

EID: 0027607255     PISSN: 03615235     EISSN: 1543186X     Source Type: Journal    
DOI: 10.1007/BF02666406     Document Type: Article

References (20)

1. The rates of oxidation of several faces of a single crystal of copper as determined with elliptically polarized light
2. Effects of Deposition Conditions on Texture in Copper Thin Films on Si (111)
3. A high ionization efficiency source for partially ionized beam deposition
4. A Direct Method of Determining Preferred Orientation of a Flat Reflection Sample Using a Geiger Counter X-Ray Spectrometer