Anomalies in the measurement of the residual gases in a large uhv system using a quadrupole mass analyser

Vacuum

Volumn 44, Issue 5-7, 1993, Pages 647-651

  Bennett, JRJ ^a   Elsey, RJ ^a  

^a SCIENCE AND TECHNOLOGY FACILITIES COUNCIL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEGASSING; HYDROGEN; VACUUM PUMPS;

QUADRUPOLE MASS ANALYZERS; RESIDUAL GASES; ULTRAHIGH VACUUM;

MASS SPECTROMETERS;

EID: 0027591165     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(93)90116-R     Document Type: Article

References (13)

1. Max-Planck-Institut für Quantenoptik Report No MPQ 147
2. Conditioning of ion sources for mass spectrometry of plasmas
3. Technology of low-pressure systems−establishment of optimum conditions to obtain low degassing rates on 316 L stainless steel by heat treatments
4. Proc 6th Int Vac Congr