Effect of boron incorporation on the `quality' of MPCVD diamond films

Diamond and Related Materials

Volumn 2, Issue 5 -7 pt 2, 1993, Pages 742-745

  Gheeraert, E ^a   Gonon, P ^a   Deneuville, A ^a   Abello, L ^a   Lucazeau, G ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; DOPING (ADDITIVES); FILM GROWTH; MORPHOLOGY; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SYNTHESIS (CHEMICAL);

FULL WIDTH AT HALF MAXIMUM; MICROWAVE PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION;

SYNTHETIC DIAMONDS;

EID: 0027583207     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (18)