The mechanical and tribological properties of titanium nitride coatings formed in a four magnetron closed-field sputtering system

Surface and Coatings Technology

Volumn 57, Issue 1, 1993, Pages 61-69

  Efeoglu, I ^a   Arnell, R D ^a   Tinston, S F ^a   Teer, D G ^b  

^a UNIVERSITY OF SALFORD   (United Kingdom)

^b DG Teer Coating Services Ltd285/286 Hartlebury Trading Estate ^*  (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

HARDNESS; MAGNETRONS; MECHANICAL TESTING; MORPHOLOGY; SPUTTER DEPOSITION; STEEL; STRUCTURE (COMPOSITION); SUBSTRATES; SURFACE PROPERTIES; TITANIUM COMPOUNDS; TRIBOLOGY; WEAR RESISTANCE;

MAGNETRON SPUTTERING; PIN ON DISC TESTING; RELOCATION PROFILOMETRY; TITANIUM NITRIDE COATINGS;

PROTECTIVE COATINGS;

EID: 0027576597     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(93)90337-N     Document Type: Article

References (6)