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Volumn 185, Issue 1-4, 1993, Pages 1-15
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Thin films and devices of diamond, silicon carbide and gallium nitride
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMISTRY;
DEPOSITION;
DIAMONDS;
ELECTRIC PROPERTIES;
MICROELECTRONICS;
MICROSTRUCTURE;
NITRIDES;
OPTOELECTRONIC DEVICES;
SEMICONDUCTING FILMS;
SILICON CARBIDE;
STRUCTURE (COMPOSITION);
THERMODYNAMIC PROPERTIES;
GALLIUM NITRIDE;
THIN FILMS;
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EID: 0027574150
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/0921-4526(93)90210-W Document Type: Article |
Times cited : (127)
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References (113)
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