Metalorganic vapor phase epitaxy of cugas2 using ditertiarybutylsulfide as the sulfur source

Japanese Journal of Applied Physics

Volumn 32, Issue 4 B, 1993, Pages L560-L562

  Honda, Tohru ^a   Otoma, Hiromi ^a   Hara, Kazuhiko ^a   Yoshino, Junji ^a   Kukimoto, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Chalcopyrite compound; CuGaS2; Ditertiarybutylsulfide; MOVPE

Indexed keywords

EPITAXIAL GROWTH; FILM GROWTH; ORGANOMETALLICS; SULFUR COMPOUNDS;

CHALCOPYRITE COMPOUNDS; COPPER GALLIUM SULFIDE; CYCLOPENTADIENYL TRIETHYLPHOSPHINE COPPER; DITERTIARYBUTYLSULFIDE; LAYER THICKNESS UNIFORMITY; METALORGANIC VAPOR PHASE EPITAXY; TRIETHYLGALLIUM;

COPPER COMPOUNDS;

EID: 0027572898     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.32.L560     Document Type: Article

References (7)

1. K. Hara, T. Kojima and H. Kukimoto: Jpn. J. Appl. Phys. 26 (1987) L1107.
2. K. Hara, T. Shinozawa, J. Yoshino and H. Kukimoto: J. Cryst. Growth 93 (1988) 771.
3. K. Hara, T. Shinozawa, J. Yoshino and H. Kukimoto: Jpn. J. Appl. Phys. 30 (1991) L347.
4. H. Otoma, T. Honda, K. Hara, J. Yoshino and H. Kukimoto: J. Cryst. Growth, 115 (1991) 807.
5. P. J. Wright, R. J. Griffiths and B. Cockayne: J. Gryst. Growth 66 (1984) 24.
6. Sg. 'Fujita, M. Isemura, T. Sakamoto and N. Yoshimura: J. Cryst. Growth 86 (1988) 263.
7. C. H. Chen, C. A. Larsen and G. B. Stringfellow: Appl. Phys. Lett. 50 (1987) 218.