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Volumn 3, Issue 1, 1993, Pages 4-7
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Analysis of tip deflection and force of a bimetallic cantilever microactuator
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Author keywords
[No Author keywords available]
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Indexed keywords
BIMETALLIC CANTILEVER MICROACTUATORS;
ELECTROMECHANICAL PERFORMANCE;
FINITE ELEMENT ANALYSIS;
TIP DEFLECTION;
BIMETALS;
FINITE ELEMENT METHOD;
MATHEMATICAL MODELS;
MICROELECTROMECHANICAL DEVICES;
PERFORMANCE;
ACTUATORS;
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EID: 0027565639
PISSN: 09601317
EISSN: None
Source Type: Journal
DOI: 10.1088/0960-1317/3/1/002 Document Type: Article |
Times cited : (232)
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References (9)
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