Modeling of the electromechanical performance of piezoelectric laminated microactuators

Journal of Micromechanics and Microengineering

Volumn 3, Issue 1, 1993, Pages 18-23

  Meng, Qingyuan ^a   Mehregany, M ^a   Deng, K ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL PERFORMANCE; PIEZOELECTRIC LAMINATED MICROACTUATORS;

DEFORMATION; ELECTRIC FIELD EFFECTS; LAMINATES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PERFORMANCE; PIEZOELECTRIC DEVICES;

ACTUATORS;

EID: 0027565549     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/3/1/005     Document Type: Article

References (11)