A superconductive integrated circuit foundry

IEEE Transactions on Applied Superconductivity

Volumn 3, Issue 1, 1993, Pages 2043-2049

  Abelson, L A ^a   Thomasson, S L ^a   Murduck, J M ^a   Elmadjian, R ^a   Akerling, G ^a   Kono, R ^a   Chan, H W ^a  

^a NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOUNDRIES; INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; PROCESS CONTROL; SUPERCONDUCTING DEVICES; SUPERCONDUCTING MATERIALS;

ASIC; FINE-LINE LITHOGRAPHY; IC FOUNDRIES; SUPERCONDUCTING IC;

INTEGRATED CIRCUIT LAYOUT;

EID: 0027560472     PISSN: 10518223     EISSN: 15582515     Source Type: Journal    
DOI: 10.1109/77.233455     Document Type: Letter

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