Planarization Techniques for Multilevel Hts Integrated Circuit Process

IEEE Transactions on Applied Superconductivity

Volumn 3, Issue 1, 1993, Pages 2373-2376

  Marathe, Amit P ^a   Meng, Xiaofan ^a   Hebert, David F ^a   Nagai, Yasuhiro ^a   Van Duzer, Theodore ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; COPPER OXIDES; EPITAXIAL GROWTH; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; YTTRIUM COMPOUNDS;

EPITAXIAL HTS PROCESSES; ETCH-BACK PLANARIZATION; MULTILEVEL HTS;

HIGH TEMPERATURE SUPERCONDUCTORS;

EID: 0027557930     PISSN: 10518223     EISSN: 15582515     Source Type: Journal    
DOI: 10.1109/77.233424     Document Type: Letter

References (8)

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