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Volumn 3, Issue 1, 1993, Pages 2211-2214
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Niobium Nitride Josephson Junction Process Development
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Author keywords
[No Author keywords available]
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Indexed keywords
INTEGRATED CIRCUIT MANUFACTURE;
LSI CIRCUITS;
NIOBIUM COMPOUNDS;
STATISTICAL METHODS;
SUPERCONDUCTING MATERIALS;
TUNNEL DIODES;
NIOBIUM NITRIDE;
SUPERCONDUCTING CIRCUITS;
TUNNEL JUNCTIONS;
JOSEPHSON JUNCTION DEVICES;
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EID: 0027554946
PISSN: 10518223
EISSN: 15582515
Source Type: Journal
DOI: 10.1109/77.233566 Document Type: Letter |
Times cited : (7)
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References (9)
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