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Volumn 3, Issue 1, 1993, Pages 1980-1982

Fabrication and Characterization of Single-Electron Tunneling Transistors in the Superconducting State

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ELECTRON TUNNELING; SEMICONDUCTOR JUNCTIONS; SUPERCONDUCTING MATERIALS; TRANSISTORS;

EID: 0027554230     PISSN: 10518223     EISSN: 15582515     Source Type: Journal    
DOI: 10.1109/77.233570     Document Type: Letter
Times cited : (19)

References (8)
  • 1
    • 84949078125 scopus 로고    scopus 로고
    • The PMMA/MAA copolymer (available in beads from Esschem Co.) was dissolved in glacial acetic acid (0.06 kg/l), spun at 4500 rpm for 45 seconds, and baked for 1 hr at 180°C.
    • The 950K PMMA (diluted to 1.5% by weight in chlorobenzene; solution available from KTI Chemicals, Inc.) was then spun at 5000 rpm for 45 seconds and baked for 1 hr at 180°C
    • The PMMA/MAA copolymer (available in beads from Esschem Co.) was dissolved in glacial acetic acid (0.06 kg/l), spun at 4500 rpm for 45 seconds, and baked for 1 hr at 180°C., The 950K PMMA (diluted to 1.5% by weight in chlorobenzene; solution available from KTI Chemicals, Inc.) was then spun at 5000 rpm for 45 seconds and baked for 1 hr at 180°C
  • 2
    • 21544444472 scopus 로고
    • Offset masks for lift-off photoprocessing
    • September
    • G.J., Dolan, Offset masks for lift-off photoprocessing, Applied Physics Letters, 31, 337, 339, September 1977
    • (1977) Applied Physics Letters , vol.31 , pp. 337-339
    • Dolan, G.J.1
  • 3
    • 0000601312 scopus 로고
    • Charging effects and quantum properties of small superconducting tunnel junctions
    • April
    • M., Iansiti, M., Tinkham, A.T., Johnson, W.F., Smith, C.J., Lobb, Charging effects and quantum properties of small superconducting tunnel junctions, Physical Review B, 39, 6467, April 1989
    • (1989) Physical Review B , vol.39 , pp. 6467
    • Iansiti, M.1    Tinkham, M.2    Johnson, A.T.3    Smith, W.F.4    Lobb, C.J.5
  • 6
    • 0001630171 scopus 로고
    • Observation of single-electron electron charging effects in small tunnel junctions
    • July
    • T.A., Fulton, G.J., Dolan, Observation of single-electron electron charging effects in small tunnel junctions, Physical Review Letters, 59, 109, 112, July 1987
    • (1987) Physical Review Letters , vol.59 , pp. 109-112
    • Fulton, T.A.1    Dolan, G.J.2
  • 7
    • 84949078713 scopus 로고
    • Experimental evidence for parity-based 2e-periodicity periodicity in a superconducting single-electron tunneling transistor
    • June
    • M.T., Tuominen, J.M., Hergenrother, T.S., Tighe, M., Tinkham, Experimental evidence for parity-based 2e-periodicity periodicity in a superconducting single-electron tunneling transistor, June 1992
    • (1992)
    • Tuominen, M.T.1    Hergenrother, J.M.2    Tighe, T.S.3    Tinkham, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.