|
Volumn 48, Issue 4, 1993, Pages 521-529
|
Analytical characteristics of a helium/hydrogen capacitively coupled microwave plasma
a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
COMPOSITION EFFECTS;
ELECTRIC EXCITATION;
EMISSION SPECTROSCOPY;
GAS DETECTORS;
HELIUM;
HYDROGEN;
ROTATION;
SIGNAL INTERFERENCE;
SIGNAL PROCESSING;
STRUCTURE (COMPOSITION);
TEMPERATURE MEASUREMENT;
ATOMIC EMISSION SIGNALS;
CAPACITIVELY COUPLED MICROWAVE PLASMA;
HELIUM/HYDROGEN PLASMA;
MOLECULAR GAS;
PLASMA GAS;
PLASMAS;
|
EID: 0027553005
PISSN: 05848547
EISSN: None
Source Type: Journal
DOI: 10.1016/0584-8547(93)80057-2 Document Type: Article |
Times cited : (18)
|
References (56)
|