Ultra fine particle films by gas deposition method

Materials Research Society Symposium Proceedings

Volumn 286, Issue , 1993, Pages 121-130

  Oda, Masaaki ^a   Katsu, Isao ^a   Tsuneizumi, Michitaka ^a   Fuchita, Eiji ^a   Kashu, Seiichiro ^a   Hayashi, Chikara ^a  

^a Vacuum Metallurgical Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONDENSATION; EVAPORATION; GOLD; MASKS; PARTICLES (PARTICULATE MATTER); PIPE FLOW; SILVER; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

GAS DEPOSITION METHOD; GAS EVAPORATION METHOD; ULTRA FINE PARTICLE FILMS;

METALLIC FILMS;

EID: 0027306996     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)