Vapor deposition of parylene films from precursors

Materials Research Society Symposium Proceedings

Volumn 282, Issue , 1993, Pages 593-598

  You, L ^a   Yang, G R ^a   Lang, C I ^a   Wu, P ^a   Moore, J A ^a   McDonald, J F ^a   Lu, T M ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; FILM GROWTH; INFRARED SPECTROSCOPY; MONOMERS; PLASTIC FILMS; POLYMERIZATION; THERMODYNAMIC STABILITY; VAPOR DEPOSITION; X RAY SPECTROSCOPY;

PARYLENE FILMS;

DIELECTRIC FILMS;

EID: 0027290097     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)