Implementation of a MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 207-212

  Gilbert, J R ^a   Osterberg, P M ^a   Harris, R M ^a   Ouma, D O ^a   Cai, X ^a   Pfajfer, A ^a   White, J ^a   Senturia, S D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; ELECTROSTATICS;

LEVITATION FORCES; MEMCAD SYSTEM;

COMPUTER AIDED DESIGN;

EID: 0027286830     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)