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Volumn 29, Issue 1, 1993, Pages 259-263

Optical characterization of sputtered carbon films

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; HYDROGENATION; NONDESTRUCTIVE EXAMINATION; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; SPUTTERING; THIN FILMS; WEAR OF MATERIALS;

EID: 0027283182     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.195579     Document Type: Article
Times cited : (45)

References (26)
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