GeSi infrared photodetectors grown by rapid thermal CVD

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1804, Issue , 1993, Pages 94-106

  Jalali, Bahram ^a   Naval, Luis ^a   Levi, Anthony F ^a   Watson, P ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; INFRARED DEVICES; OPTICAL WAVEGUIDES; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS;

EXTERNAL QUANTUM EFFICIENCY; EYE-DIAGRAM; RAPID THERMAL CVD; WAVEGUIDE DETECTORS;

PHOTODETECTORS;

EID: 0027269003     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)