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Volumn 63, Issue 1-4, 1993, Pages 240-244
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Chemical composition of porous silicon layers studied by IR spectroscopy
a
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPOSITION;
HYDROGEN;
INFRARED SPECTROSCOPY;
NONDESTRUCTIVE EXAMINATION;
OXIDATION;
OXYGEN;
PHOTOLUMINESCENCE;
POROUS MATERIALS;
CHEMICAL COMPOSITION;
POROUS SILICON;
SEMICONDUCTING SILICON;
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EID: 0027264399
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/0169-4332(93)90098-V Document Type: Article |
Times cited : (22)
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References (16)
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