Alternate titanium source compounds for CVD of Ti/TiC coatings

Materials Research Society Symposium Proceedings

Volumn 282, Issue , 1993, Pages 299-304

  Groshens, Thomas J ^a   Lowe Ma, Charlotte K ^a   Scheri, Richard C ^a   Dalbey, Robert Z ^a  

^a NAVAL AIR WARFARE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; FILM GROWTH; INTERFACES (MATERIALS); THIN FILMS; TITANIUM; TITANIUM CARBIDE; X RAY ANALYSIS;

TITANIUM PRECURSOR COMPOUNDS;

TITANIUM COMPOUNDS;

EID: 0027245351     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)