Diffractive optical elements fabricated by laser direct writing and other techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1751, Issue , 1993, Pages 2-12

  Langlois, Pierre ^a   Jerominek, Hubert ^a   Leclerc, Luc ^a   Pan, Jin ^a  

^a INO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; ELECTRON BEAM LITHOGRAPHY; FABRICATION; HOLOGRAPHY; LASER APPLICATIONS; LITHOGRAPHY; MASKS; MICROLITHOGRAPHY;

BINARY OPTICS; DIFFRACTIVE OPTICAL ELEMENTS; HOLOGRAPHIC RECORDING; LASER DIRECT WRITING; PATTERN GENERATION;

OPTICAL DEVICES;

EID: 0027242460     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.142573     Document Type: Conference Paper

References (11)