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Volumn 282, Issue , 1993, Pages 203-208
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Covalent nitrides for maskless laser writing of microscopic metal lines
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL ANALYSIS;
COPPER COMPOUNDS;
GLOW DISCHARGES;
LASER APPLICATIONS;
METALLIZING;
NICKEL COMPOUNDS;
PLASMA APPLICATIONS;
PYROLYSIS;
SPUTTER DEPOSITION;
THERMODYNAMIC STABILITY;
TIN COMPOUNDS;
COVALENT METAL NITRIDES;
MASKLESS LASER WRITING;
MICROSCOPIC METAL LINES;
NITRIDES;
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EID: 0027211159
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (60)
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References (8)
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