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Volumn 40, Issue 1, 1993, Pages 157-162
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Transconductance and Mobility of Si: B Delta MOSFET’s
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Author keywords
[No Author keywords available]
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Indexed keywords
FIELD EFFECT TRANSISTORS;
MASS SPECTROMETERS;
MOLECULAR BEAM EPITAXY;
SEMICONDUCTING SILICON;
DELTA LAYER BROADENING;
DELTA-DOPED MOSFETS;
PARASITIC SURFACE-CHANNEL FET;
SECONDARY ION MASS SPECTROMETRY (SIMS);
TRANSCONDUCTANCE MEASUREMENT;
MOSFET DEVICES;
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EID: 0027186815
PISSN: 00189383
EISSN: 15579646
Source Type: Journal
DOI: 10.1109/16.249439 Document Type: Article |
Times cited : (8)
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References (12)
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