Polymer bonding of micro-machined silicon structures

Volumn , Issue , 1992, Pages 104-109

  den Besten, C ^a   van Hal, R E G ^a   Munoz, J ^a   Bergveld, P ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; PHOTORESISTS; POLYMERS; SEMICONDUCTOR DEVICE MANUFACTURE;

INDIRECT BONDING; MICROMACHINED SILICON; NEGATIVE PHOTORESISTS; POLYMER BONDING;

SEMICONDUCTING SILICON;

EID: 0027084851     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1992.187699     Document Type: Conference Paper

References (12)