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Volumn , Issue , 1992, Pages 43-48
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Anodic bonding for integrated capacitive sensors
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ANODIC OXIDATION;
BONDING;
CAPACITORS;
GLASS;
INTEGRATED CIRCUITS;
SILICON;
ANODIC BONDING;
CAPACITIVE SENSORS;
CIRCUIT DAMAGE;
INTEGRATED CAPACITIVE SENSORS;
PYREX GLASS;
WAFER DISTORTION;
SENSORS;
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EID: 0027084126
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/memsys.1992.187688 Document Type: Conference Paper |
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Times cited : (43)
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References (8)
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