Voltage-dividing potentiometer enhancements for high-precision feature placement metrology

Volumn , Issue , 1992, Pages 174-179

  Allen, R A ^a   Cresswell, M W ^a   Ellenwood, C H ^a   Linholm, L W ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC VARIABLES MEASUREMENT; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; MEASUREMENT ERRORS;

CENTER-TO-CENTER SEPARATION; FEATURE-PLACEMENT METROLOGY; RESIDUAL ERRORS; VOLTAGE-DIVIDING POTENTIOMETERS;

POTENTIOMETERS (ELECTRIC MEASURING INSTRUMENTS);

EID: 0027084108     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)