Surface-normal electrostatic/pneumatic actuator

Volumn , Issue , 1992, Pages 128-132

  Gabriel, K J ^a   Tabata, O ^a   Shimaoka, K ^a   Sugiyama, S ^a   Fujita, H ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; MEMBRANES; PNEUMATIC EQUIPMENT;

ELECTROSTATIC ACTUATORS; PNEUMATIC ACTUATORS; SURFACE-NORMAL ACTUATORS;

ACTUATORS;

EID: 0027070118     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1992.187703     Document Type: Conference Paper

References (8)