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Volumn , Issue , 1992, Pages 72-77
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Submicron, movable gallium arsenide mechanical structures and actuators
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
CRYSTALS;
ETCHING;
INTEGRATED CIRCUIT MANUFACTURE;
SEMICONDUCTOR DEVICE MANUFACTURE;
GALLIUM ARSENIDE;
REACTIVE ETCHING;
SINGLE CRYSTALS;
SEMICONDUCTING GALLIUM COMPOUNDS;
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EID: 0027063492
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/memsys.1992.187693 Document Type: Conference Paper |
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Times cited : (13)
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References (13)
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