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Volumn , Issue , 1992, Pages 141-146
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Batch fabrication and assembly of micromotor-driven mechanisms with multi-level linkages
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC MOTORS;
ELECTROSTATIC DEVICES;
MECHANISMS;
SEMICONDUCTING SILICON;
BATCH FABRICATION;
BULK SILICON;
ELECTROSTATIC MICROMOTORS;
MICROMECHANICAL DEVICES;
MICROMOTORS;
MULTILEVEL LINKAGES;
WAFER FABRICATION;
INTEGRATED CIRCUIT MANUFACTURE;
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EID: 0027061092
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/memsys.1992.187706 Document Type: Conference Paper |
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Times cited : (11)
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References (6)
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