Helical microstructures grown by laser assisted chemical vapor deposition

Volumn , Issue , 1992, Pages 162-167

  Boman, Mats ^a   Westberg, Helena ^a   Johansson, Stefan ^a   Schweitz, Jan A°ke ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC COILS; GONIOMETERS; LASER APPLICATIONS; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; SEMICONDUCTING SILICON; SOLENOIDS;

HELICAL MICROSTRUCTURES; LASER ASSISTED CVD; SQUID EQUIPMENT; TUNGSTEN COILS;

SEMICONDUCTOR GROWTH;

EID: 0027039705     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1992.187711     Document Type: Conference Paper

References (7)