Micro electromechanical filters for signal processing

Volumn , Issue , 1992, Pages 226-231

  Lin, Liwei ^a   Nguyen, Clark T C ^a   Howe, Roger T ^a   Pisano, Albert P ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

RESONATORS; SEMICONDUCTING SILICON; SIGNAL PROCESSING;

MICROELECTROMECHNICAL FILTERS; MICRORESONATORS; POLYSILICON;

ELECTROMECHANICAL FILTERS;

EID: 0027039188     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1992.187722     Document Type: Conference Paper

References (24)