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Volumn , Issue , 1992, Pages 208-213
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Micron-sized, high aspect ratio bulk silicon micromechanical devices
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
ELECTROSTATICS;
ETCHING;
SEMICONDUCTING SILICON;
SENSORS;
BULK SILICON;
MICROACTUATORS;
MICROMECHANICAL DEVICES;
MICROSENSORS;
REACTIVE ION ETCHING;
SILICON WAFERS;
SEMICONDUCTOR DEVICES;
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EID: 0027036943
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/memsys.1992.187719 Document Type: Conference Paper |
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Times cited : (13)
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References (11)
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