Molding of three dimensional microstructures by the LIGA process

Volumn , Issue , 1992, Pages 202-207

  Harmening, M ^a   Bacher, W ^a   Bley, P ^a   El Kholi, A ^a   Kalb, H ^a   Kowanz, B ^a   Menz, W ^a   Michel, A ^a   Mohr, J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROFORMING; LITHOGRAPHY; PLASTICS MOLDING;

3-D MICROSTRUCTURES; POLYMETHYL METHACRYALATE; STEPPED MICROSTRUCTURES; X-RAY LITHOGRAPHY;

CRYSTAL MICROSTRUCTURE;

EID: 0027035861     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1992.187718     Document Type: Conference Paper

References (8)