Integrated multi-element ultra-thin-film gas analyzer

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 19-22

  Najafi, N ^a   Wise, K D ^a   Merchant, R ^a   Schwank, J W ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTORS; GASES; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILMS;

CONTROL/INTERFACE CHIP; DUAL-ELEMENT DETECTOR CHIPS; MULTI-ELEMENT ULTRA-THIN-FILM GAS ANALYZER;

SENSORS;

EID: 0027003705     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)