Fabrication of submicron GaAs Schottky diodes for mixers/detectors operating in the submillimetre wave region

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1929, Issue , 1992, Pages 210-211

  Suzuki, T ^a   Chang, J J ^a   Nozokido, T ^a   Kuwano, R ^a   Mizuno, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLOTRON RESONANCE; DETECTOR CIRCUITS; ELECTRON BEAM LITHOGRAPHY; ETCHING; MICROWAVE DEVICES; MILLIMETER WAVES; MIXER CIRCUITS; PLASMAS; SEMICONDUCTING GALLIUM COMPOUNDS; VIDEO SIGNAL PROCESSING;

GALLIUM ARSENIDE; MIXERS/DETECTORS; PLASMA ETCHING; SUBMICRON DIODES; SUBMILLIMETER WAVE REGION;

SCHOTTKY BARRIER DIODES;

EID: 0026990731     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)