Design considerations of a piezoelectric-on-silicon microrobot

Sensors and Actuators: A. Physical

Volumn 35, Issue 2, 1992, Pages 129-135

  Smits, Jan G ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MOTORS; ROBOTS;

MICROMOTORS; MICROROBOTS; PIEZOELECTRIC BIMORPHS;

PIEZOELECTRIC DEVICES;

EID: 0026986188     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(92)80151-R     Document Type: Article

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