Laser-assisted chemical vapor deposition of device-quality GaAs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1676, Issue , 1992, Pages 94-100

  Roberts, John C ^a   Liu, H ^a   Boutros, Karim ^a   Ramdani, J ^a   Bedair, Salah M ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; INTEGRATED CIRCUIT MANUFACTURE; LASER APPLICATIONS; LASER BEAMS; MESFET DEVICES;

GAAS MESFETS; GALLIUM ARSENIDE; LASER-ASSISTED CVD; LCVD GROWTH;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0026980704     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)