Silicon carbide as a new micromechanics material

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 198-201

  Tong, Lijun ^a   Mehregany, Mehran ^a   Matus, Lawrence G ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; MICROMACHINING; SILICON CARBIDE;

MICROMECHANICS; YOUNG'S MODULUS;

SENSORS;

EID: 0026976655     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)