High-performance poly-Si thin-film transistors with excimer-laser annealed silicon-nitride gate

Conference on Solid State Devices and Materials

Volumn , Issue , 1992, Pages 49-51

  Shimizu, Kazuhiro ^a   Higashimoto, Masayuki ^a   Nakamura, Kyoutarou ^a   Sugiura, Osamu ^a   Matsumura, Masakiyo ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; SEMICONDUCTING SILICON; SILICON NITRIDE; THIN FILMS;

POLYSILICON; THIN FILM TRANSISTORS;

TRANSISTORS;

EID: 0026970845     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.7567/ssdm.1992.b-1-2     Document Type: Conference Paper

References (5)