Chemical Vapor Deposition of Boron Nitride

Journal of the Electrochemical Society

Volumn 139, Issue 12, 1992, Pages 3558-3565

  Luthra, K L ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b GE GLOBAL RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; NITRIDES; REACTION KINETICS; THERMODYNAMICS;

ACTIVATION ENERGY; BORON NITRIDE; INTERFACE REACTIONS;

CERAMIC MATERIALS;

EID: 0026970605     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2069121     Document Type: Article

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