Micromachined condenser hydrophone

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 161-165

  Bernstein, J ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; SENSORS;

CONDENSER HYDROPHONE; FERROELECTRIC SENSORS;

HYDROPHONES;

EID: 0026960670     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)