Hinged polysilicon structures with integrated CMOS TFTS

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 136-139

  Pister, Kristofer S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER AIDED DESIGN; MICROMACHINING; SENSORS; THIN FILM DEVICES; TRANSISTORS;

HINGED POLYSILICON STRUCTURES; INTEGRATED HINGES; MICROMACHINING PROCESS; POLYSILICON;

CMOS INTEGRATED CIRCUITS;

EID: 0026960668     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)